Temperature Fiber-Optic Sensor with ZnO ALD Coating
نویسندگان
چکیده
This study presents a microsphere-based fiber-optic sensor with ZnO Atomic Layer Deposition (ALD) coating thickness of 100 nm for temperature measurements. Metrological properties the were investigated over range °C to 300 °C, 10 step. An interferometric signal is used control whether microstructure whole. Spectrum shift reflected ascertain changes in measured parameter. With changing temperature, peak position also changes. The R2 coefficient presented indicates good linear fit 0.99 obtained data. sensitivity this equals 0.019 nm/°C.
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ژورنال
عنوان ژورنال: Engineering proceedings
سال: 2021
ISSN: ['2673-4591']
DOI: https://doi.org/10.3390/engproc2020002099